Leakage currents and Fermi-level shifts in GaN layers upon iron and carbon-doping

Abstract

Semi-insulating GaN is a prerequisite for lateral high frequency and high power electronic devices to isolate the device region from parasitic conductive channels. The commonly used dopants for achieving semi-insulating GaN, Fe, and C cause distinct properties of GaN layers since the Fermi-level is located either above (Fe) or below (C) the midgap position. In this study, precursor-based doping of GaN in metalorganic vapor phase epitaxy is used at otherwise identical growth conditions to control the dopant concentrations in the layer. Using electric force microscopy, we have investigated the contact potentials of Fe- and C-doped samples with respect to a cobalt metal probe tip in dependence of on the dopant concentration. While in Fe-doped samples the sign of the contact potential is constant, a change from positive to negative contact potential values is observed at high carbon concentrations, indicating the shift of the Fermi-level below the midgap position. In vertical transport measurements, C-doped GaN layers with a dopant concentration of 4.6 × 1018 cm−3 exhibit up to 5 orders of magnitude lower dark current at room temperature and significantly lower temperature dependence than Fe-doped samples with a similar dopant concentration. Therefore, precursor-based carbon doping is the superior doping technique to achieve semi-insulating GaN.