Leakage current variation with time in Ta2O5 MIM and MIS capacitors

J-p. Manceau,A. Sylvestre,P. Gonon,S. Bruyere,S. Jeannot

doi:10.1109/irws.2006.305226

Leakage current variation with time in Ta2O5 MIM and MIS capacitors

J-p. Manceau, A. Sylvestre + Show 3 more

https://doi.org/10.1109/irws.2006.305226

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Publication Date: Oct 1, 2006

Citations: 15

Affiliation: Université Grenoble Alpes, Joseph Fourier University, French National Centre for Scientific Research, CEA LETI, Atomic Energy and Alternative Energies Commission, STMicroelectronics (France)

#MIS Capacitors #Low Frequency Dielectric Spectroscopy + Show 8 more

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Abstract

In this paper Ta2O5 current instability in MIM and MIS capacitors is studied over several sample thicknesses with a current versus time measurement and a low frequency dielectric spectroscopy. Three types of phenomena is identified: polarization current (attributed to dielectric relaxation phenomena), conduction current (attributed to a Poole-Frenkel mechanism) and resistance degradation. This last one has been attributed to ionic diffusion in dielectric and follows the Space-Charge-Limited (SCL) theory. According to physical characterization the origin of resistance degradation has been attributed to oxygen vacancies migration.

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