Abstract

X-ray photoelectron spectroscopy (XPS) revealed a lead-rich carbonatelike surface layer on polycrystalline lead zirconate titanate films grown by metal-organic chemical vapor deposition. In situ XPS studies indicated that lead originally present in the oxide film reacted with Pt during its deposition, forming a Ti∕Zr-rich defective interfacial layer. Lead zirconate titanate films that underwent a nitric acid treatment, which effectively removed the surface layer, exhibited a stretched out of the hysteresis loop in the vicinity of the coercive field, consistent with the presence of a nonferroelectric passive layer. Reasonable agreement between the XPS-measured interface layer thickness and the thickness determined by electrical characterization was obtained.

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