Abstract
In this paper, we present a new approach to the fabrication of integrated silicon-based piezoelectric diaphragm-type biosensors by using sodium potassium niobate-silver niobate (0.82KNN-0.18AN) composite lead-free thin film as the piezoelectric layer. The piezoelectric diaphragms were designed and fabricated by micro-machining technology and chemical solution deposition. The fabricated device was very sensitive to the mass changes caused by various targets attached on the surface of diaphragm. The measured mass sensitivity value was about 931 Hz/μg. Its good performance shows that the piezoelectric diaphragm biosensor can be used as a cost-effective platform for nucleic acid testing.
Highlights
Over the past few decades, researchers have focused on developing sensors with high sensitivity and low limits of detection
The resonant frequency was continuously shifted to the lower domain, indicating an mass increasing during each process
The piezoelectric diaphragms were fabricated by combining the chemical solution deposition method with withtraditional traditionalsilicon silicon micromachining technology; the fabrication processing steps are method micromachining technology; the fabrication processing steps are shown shown in
Summary
Over the past few decades, researchers have focused on developing sensors with high sensitivity and low limits of detection. Piezoelectric devices have been widely used as micro-pumps, actuators, transducers and biosensors [9,10,11,12,13,14,15,16,17,18]. The development of micro-machined piezoelectric biosensors has become a focus of attention because of their merits such as compact size, high sensitivity, label-free operation, rapid response and compatibility with integrated circuit techniques [22,23,24,25,26,27]. Piezoelectric biosensors are mass-sensitive which is detected by measuring the shift of resonant frequency of the devices [25,28]. Electrical properties compared to pure KNN film [30]
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