Abstract
ABSTRACTSingle crystals of silicon and diamond were implanted at 300K with 70 keV 3He. Ion channeling analyses were executed by application of Rutherford backscattering spectrometry and nuclear reaction analysis. Helium exhibits a non-random lattice site in the channeling angular distributions for silicon and diamond. A major fraction of the implanted 3He was qualitatively identified to be near to the tetrahedral interstice in both materials.
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