Abstract
Lateral-deflection-controlled dual-axis friction force microscopy (FFM) is presented. In this method, an electrostatic force generated with a probe-incorporated micro-actuator compensates for friction force in real time during probe scanning using feedback control. This equivalently large rigidity can eliminate apparent boundary width and lateral snap-in, which are caused by lateral probe deflection. The method can evolve FFM as a method for quantifying local frictional properties on the micro/nanometer-scale by overcoming essential problems to dual-axis FFM.
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