Abstract
The paper deals with the influence of laser irradiation of growing TiN films on their phase composition. The TiN films were prepared by d.c. reactivity magnetron sputtering under concurrent irradiation by a continuous argon ion laser beam (4 W) continuous wave) with a diameter of 6 mm. Films were characterized by X-ray diffraction analysis. It has been demonstrated that the laser irradiation of the growing film can stimulate the growth of εTi 2N phase.
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