Abstract
Amorphous Si<SUB>3</SUB>N<SUB>4</SUB>, Si/N/C and crystalline SiC nano- powders, 5 - 50 nm in mean diameter, with yields of 250 g/h were synthesized via laser induced gas phase reactions flow cost hexamethyldisilazane (HMDS) and NH<SUB>3</SUB> (or H<SUB>2</SUB>). Reaction flame temperatures, which were controlled by the total gas flow rate, greatly influenced powder composition and crystallinity. Amorphous Si<SUB>3</SUB>N<SUB>4</SUB> powders (96 wt%) were obtained at 1000 degrees Celsius flow HMDS + NH<SUB>3</SUB>; (beta) -SiC (93 wt%) was formed at 1600 degrees Celsius with H<SUB>2</SUB>. Amorphous Si/N/C powders with various N/C ratios (0.1 - 6) were synthesized at various temperatures. The main impurities in the powders were the organo-ligands such as NH<SUB>x</SUB> and CH<SUB>x</SUB> (X equals 1 - 3) whose existence also resulted in a strong surface absorption of oxygen. Commercial production technologies of above mentioned powders were also stated.
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