Abstract
We report on the development of an all-interferometric optomechatronic sensor for the detection of multi-degrees-of-freedom displacements of a remote target. The prototype system exploits the self-mixing technique and consists only of a laser head, equipped with six laser sources, and a suitably designed reflective target. The feasibility of the system was validated experimentally for both single or multi-degrees-of-freedom measurements, thus demonstrating a simple and inexpensive alternative to costly and bulky existing systems.
Highlights
A common task in precision manufacturing and micromachining is the real-time control of the tool centre point (TCP) motion and positioning
In a single-axis coordinate measuring machine (CMM), the TCP moves along linear guideways and its displacement is monitored by means of mechanical or optical encoders
It is composed of a laser head, which consists of three parallel laser diodes mounted side-by-side in a “L”-like configuration, and a target made of a plane squared mirror of 70 mm side
Summary
A common task in precision manufacturing and micromachining is the real-time control of the tool centre point (TCP) motion and positioning. Even if a slide moves linearly in one direction, which we will assume to be Sensors 2009, 9 the x-axis, the generation of motion in the other five Degrees-of-Freedom (DOFs) is unavoidable because of geometric defects of guideways, thermal expansion and/or other mechanical imperfections. For this reason, six degrees of kinematic freedom – three translational (linear motion, straightness and flatness) and three rotational (yaw, pitch and roll) – are required for the full description of the position and orientation of the TCP, the dynamic ranges and required precision may largely vary for each DOF. The replication of a single interferometric set‐up for the simultaneous evaluation of more than one DOF can thereby be problematic and often inconvenient
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