Laser - Produced Functional Surfaces of Silicon and Quartz

Abstract

Fiber laser of 1064 nm wavelength was employed for micro/nano machining process of silicon and quartz substrates. The experimental data reveal formation of silicon nanoparticles by pulse laser ablation in liquid. Various characterization techniques were used such as UV-Visible absorption, SEM morphology to examine silicon nanoparticles. Moreover, generation of microbeams from micro lens array was created by direct writing of fiber laser on quartz. Theoretical calculations using COMSOL software were adopted to estimate the surface temperature distribution at silicon and quartz surface and underneath. It is found that maximum temperature of about (4600 K) and (2400 K) for silicon and quartz respectively when 15 W laser power, 127 ns pulse duration, 30 KHz frequency and 100 mm/sec laser speed was used. Potential applications of silicon nanoparticles and microbeams array in optoelectronics and biological imaging can be conducted due to the controllable laser micro/nano machining process.