Abstract
We present experimental results on the output power stabilization of an Ar(+) laser for a direct laser writing system (LWS). Instability of the laser output power in the LWS cause resolution fluctuations of being fabricated diffractive optical elements or computer-generated holograms. For the purpose of reducing the power fluctuations, we have constituted a feedback loop with an acousto-optic modulator, a photodetector, and a servo controller. In this system, we have achieved the stability of +/-0.20% for 12 min and the relative intensity noise level of 2.1 x 10(-7) Hz(-12) at 100 Hz. In addition, we applied our system to a 2 mW internal mirror He-Ne laser. As a consequence, we achieved the output power stability of +/-0.12% for 25 min.
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