Abstract
Experimental data on laser ablation of highly oriented pyrolitic graphite by nanosecond pulsed UV (\(\lambda =193\) nm) and green (\(\lambda =532\) nm) lasers are presented. It was found that below graphite vaporization threshold \(\approx \)1 J/cm\(^{2}\), the nanoablation regime can be realized with material removal rates as low as 10\(^{-3}\) nm/pulse. The difference between physical (vaporization) and physical–chemical (heating + oxidation) ablation regimes is discussed. Special attention is paid to the influence of laser fluence and pulse number on ablation kinetics. Possibility of laser-induced graphite surface nanostructuring has been demonstrated. Combination of tightly focused laser beam and sharp tip of scanning probe microscope was applied to improve material nanoablation.
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