Abstract
We report a technically innovative method of fabricating masks for both deep-ultraviolet (UV) patterning and metal sputtering on polymethylmethacrylate (PMMA) for microfluidic systems. We used a CO 2 laser system to cut the required patterns on wax-covered plastic paper; the laser-patterned wax paper will either work as a mask for deep-UV patterning or as a mask for metal sputtering. A microfluidic device was also fabricated to demonstrate the feasibility of this method. The device has two layers: the first layer is a 1-mm thick PMMA substrate that was patterned by deep-UV exposure to create microchannels. The mask used in this process was the laser-cut wax paper. The second layer, also a 1-mm thick PMMA layer, was gold sputtered with patterned wax paper as the shadow mask. These two pieces of PMMA were then bonded to form microchannels with exposed electrodes. This process is a simple and rapid method for creating integrated microfluidic systems that do not require cleanroom facilities.
Highlights
Microfluidic systems have attracted significant attention during the past decade because of their wide applications in biology[1,2,3,4] and chemistry.[5,6,7] In the photolithography process used to fabricate these microfluidic systems, usually a laser mask writer and a quartz or soda line glass mask are required
In our approach we present a method for using laser-patterned wax-covered plastic paper as both the mask for deep-UV exposure and the shadow mask for metal sputtering
Polymer-based microfluidic devices can be fabricated in several ways, such as laser ablation,[8,9,10] hot embossing,[11,12,13] injection molding,[14,15,16] and deep-UV patterning.[17,18,19]
Summary
Microfluidic systems have attracted significant attention during the past decade because of their wide applications in biology[1,2,3,4] and chemistry.[5,6,7] In the photolithography process used to fabricate these microfluidic systems, usually a laser mask writer and a quartz or soda line glass mask are required These masks are expensive and require a cleanroom environment. The method described in this study allows for the patterning of both the channels, with improved edge quality, and electrode layers for microfluidic devices using wax-covered plastic paper. This simple technical innovation will enable the lab-on-chip community to use equipment they likely already have to rapidly prototype higher quality channels with integrated electrodes
Sign-in/Register to view highlights & summary Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
