Abstract
A regular lattice of amorphous silica microspheres is used as a microlens system for laser-induced single-step fabrication of arrays of nanoholes on a (100) Si surface. With single-pulse 265.7-nm femtosecond-laser radiation, hole diameters of 57±6.5 nm at full width at half maximum and depths of 6±1 nm have been achieved.
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