Laser-induced fluorescence spectroscopy for kinetic temperature measurement of xenon neutrals and ions in the discharge chamber of a radiofrequency ion source

Abstract

Application of single-photon absorption laser-induced fluorescence (LIF) spectroscopy for non-intrusive measurement of neutral xenon and singly charged xenon ion kinetic temperatures in the discharge chamber of a gridded radiofrequency ion source is demonstrated. A LIF spectrum analysis approach including hyperfine structure reconstruction and inverse filtering (Fourier deconvolution) is outlined. Special focus is set on optimization of post-deconvolution filtering as well as retracing of deconvolution result imperfection due to hyperfine structure parameter uncertainty, incorrect natural linewidth, and saturation of the LIF signal. The corresponding contributions to the kinetic temperature estimation error are quantified via simulation of spectral lineshapes. Deconvolution of almost unsaturated LIF spectra recorded in the center of the ion source discharge chamber reveals that the neutral xenon and xenon ion kinetic temperatures range between approximately 500 and 700 K and, respectively, 700 and 1000 K depending on the radiofrequency power supplied to the discharge.