Laser induced fluorescence monitoring of the transport of small organic molecules in an organic vapor phase deposition system

Abstract

Laser-induced fluorescence is employed for the accurate and real-time in-situ monitoring of the concentration of organic molecules in an organic vapor phase deposition (OVPD) chamber. We investigate the transport dynamics of organic species in a hot N2 carrier gas from the evaporation source to the substrate. Based on the time-dependent concentration of organic molecules obtained from their fluorescence intensity near the substrate, we find that carrier gas transport is accurately described by Poiseuille flow. The interplay between convective and diffusive forces gives rise to dispersion of organic molecules in the carrier gas, resulting in the development of plug flow as described by Taylor-Aris theory. Retention of molecules in chamber dead volumes delays transport and introduces tailing of the concentration transients. Our study indicates how OVPD system design and operating conditions can be optimized to limit the duration of transport transients, ultimately leading to precise control over the growth of complex multilayer thin film structures.