Abstract
We have reduced background (BG) photocurrent of an integrated hydrogenated amorphous Si (a-Si:H) fluorescence detector due to laser light scattering by nearly one order magnitude, significantly improving a limit of detection (LOD). The detection platform comprises a microlens and the annular fluorescence detector where a thick SiO2/Ta2O5 multilayer optical interference filter (>6 πm) is monolithically integrated on an a-Si:H pin photodiode. With a microfluidic capillary electrophoresis (CE) device mounted on the platform, the system is demonstrated to separate DNA restriction fragment digests (LOD: 58 pg/πL) with high speed, high sensitivity and high separation efficiency, implying single molecular DNA detection when combined with polymerase chain reaction (PCR). The integrated a-Si:H fluorescence detector exhibits high sensitivity for practical fluorescent labeling dyes as well as feasibility of monolithic integration with a laser diode, making it ideal for application to point-of-care microfluidic biochemical analysis.
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