Abstract
In this work we report an experimental investigation of subsurface damage (SSD) in conventionally polished fused silica (FS), sapphire substrates, and YAG crystals which are widely used in laser applications and directly influence performances of critical ultrahigh intensity and high average power laser system optics. Two surface treatment procedures were tested: 1 – plasma treatment, 2 – chemical treatment. Plasma and chemical treatments were applied to fused silica substrates. The laser induced damage threshold (LIDT) FS substrates were studied as the function of etching depth.
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