Abstract
High aspect ratio (HAR) micro-grooves are of great significance for vacuum electronic devices. However, the fabrication of HAR micro-groove on oxygen-free copper remains challenge since the high surface quality is hard to achieve. Aiming to improve the surface quality, a hybrid and successive method, obtained by combining nanosecond laser and micro-milling (NLMM), was presented. The nanosecond laser achieves the maximum workpiece removal rate, while the subsequent micro-milling provides the desired machining quality. Compared to one-way full slot micro-milling (FSMM), the presented manufacturing method (NLMM) could improve the surface quality, namely the top burr formation and the bottom and sidewall surface roughness. Furthermore, the NLMM displayed a lower tool wear rate compared to FSMM. Finally, a desired S-shaped groove with an aspect ratio of 2.5, a width of 0.2 mm, and the cycle number of 30 was successfully fabricated. The study offers a promising aspect for improving the HAR micro-groove fabrication quality.
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