Abstract
AbstractWe have investigated the pyrolytic deposition of TiN thin films on molybdenum and 304 stainless steel substrates by continuous wave (CW) and pulsed CO2 (λ=10.6 μm) laser radiation. A flow rate of NH3: TiCl4 of 5:1 was maintained during the deposition process. The substrate temperature was controlled by varying the intensity of the incident laser irradiation. The TiN films were characterized by Transmission Electron Microscopy (TEM), Auger Electron Spectroscopy (AES) and Rutherford Backscattering Spectrometry (RBS). TEM results showed that the films were polycrystalline of equiaxed nature with diffraction patterns containing the characteristic TiN rings. The films had a lattice parameter of 4.24Å. AES results showed a slight incorporation of oxygen.
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