Laser ablation of silicon and copper targets. Experimental and finite elements studies

Abstract

The ablation process induced by excimer lasers is a collective phenomenon that basically involves two phenomena: the laser radiation–matter interaction and the dynamic of the ablation plume. The laser parameters, the thermal and optical properties of the material, and the surface morphology are critical factors in the ablation mechanisms affecting the direction of the ablation plume expansion. In this study, the role of the surface roughness and the evolution of its morphology under the laser irradiation were investigated. Assuming a thermal ablation model, a theoretical study of the initial steps of the laser ablation process by a finite element method using ANSYS (6.1) was performed. Different ablation experiments were carried out on silicon and copper targets using a XeCl laser. The target surface morphology changes were observed by SEM and the plume deflection was recorded by a digital camera. An acceptable agreement between the experimental and simulated results was found. This study contributes to a better understanding of the physical processes involved in the laser ablation and the relations between the plume deflection angle and the surface roughness.