Abstract
Poly( p-tert-butylstyrene), poly( p-tert-butylstyrene sulfone), poly( p-trimethylsilylstyrene), and poly(p-trimethylsilylstyrene sulfone) films were ablated with a 248 nm excimer laser. Emission spectra of decomposed products such as Si atoms and C 2 as well as CN molecules were measured, while no information of S atoms was obtained. The effects of contained Si and S atoms upon laser ablation were examined, and the ablation dynamics was discussed.
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