Abstract
Quantum light emitters have been observed in atomically thin layers of transition metal dichalcogenides. However, they are found at random locations within the host material and usually in low densities, hindering experiments aiming to investigate this new class of emitters. Here, we create deterministic arrays of hundreds of quantum emitters in tungsten diselenide and tungsten disulphide monolayers, emitting across a range of wavelengths in the visible spectrum (610–680 nm and 740–820 nm), with a greater spectral stability than their randomly occurring counterparts. This is achieved by depositing monolayers onto silica substrates nanopatterned with arrays of 150-nm-diameter pillars ranging from 60 to 190 nm in height. The nanopillars create localized deformations in the material resulting in the quantum confinement of excitons. Our method may enable the placement of emitters in photonic structures such as optical waveguides in a scalable way, where precise and accurate positioning is paramount.
Highlights
Quantum light emitters have been observed in atomically thin layers of transition metal dichalcogenides
Deterministic creation of precisely positioned layered materials (LMs) quantum emitters (QEs) in large numbers is important for accelerating the study of these emitters, as well as opening up the prospect for scalability and on-chip applications
To create large-scale QE arrays in LMs, we place the active material on patterned structures fabricated on the substrate in order to create spatially localized physical disturbances to the otherwise flat LM flakes
Summary
Quantum light emitters have been observed in atomically thin layers of transition metal dichalcogenides. We create deterministic arrays of hundreds of quantum emitters in tungsten diselenide and tungsten disulphide monolayers, emitting across a range of wavelengths in the visible spectrum (610–680 nm and 740–820 nm), with a greater spectral stability than their randomly occurring counterparts. This is achieved by depositing monolayers onto silica substrates nanopatterned with arrays of 150-nm-diameter pillars ranging from 60 to 190 nm in height. Our technique is a crucial first step towards solving the scalability challenge for LM-based quantum photonic devices
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