Abstract
Suspended graphene can perfectly present the excellent material properties of graphene, which has a good application prospect in graphene sensors. The existing suspended graphene pressure sensor has several problems that need to be solved, one of which is the fabrication of a suspended sample. It is still very difficult to obtain large-size suspended graphene films with a high integrity that are defect-free. Based on the simulation and analysis of the kinetic process of the traditional suspended graphene release process, a novel setup for large-size suspended graphene release was designed based on the inverted floating method (IFM). The success rate of the single-layer suspended graphene with a diameter of 200 μm transferred on a stainless-steel substrate was close to 50%, which is greatly improved compared with the traditional impregnation method. The effects of the defects and burrs around the substrate cavity on the stress concentration of graphene transfer explain why the transfer success rate of large-size suspended graphene is not high. This research lays the foundation for providing large-size suspended graphene films in the area of graphene high-precision sensors.
Highlights
As an emerging 2D material, graphene has superior material properties, including a high Young’s modulus, carrier mobility, light transmittance, and good piezoresistive effect [1,2,3,4,5,6]
Based on the simulation and analysis of the dynamic process of the traditional release process, this paper designed a new scheme to transfer the single-layer graphene film on a stainless-steel substrate based on the inverted floating method (IFM) method
The diameter of the three-phase interface gradually increases. Both the theoretical analysis and simulation reveal that the extra load leads to a large deflection of the graphene membrane, which subsequently results in a huge stress at the centre regime
Summary
As an emerging 2D material, graphene has superior material properties, including a high Young’s modulus, carrier mobility, light transmittance, and good piezoresistive effect [1,2,3,4,5,6]. Isolated from the substrate, suspended graphene can almost perfectly preserve the pristine physical properties by combining the ultrahigh-vacuum environment and annealing clean process [9] This merit provides suspended graphene with great promise in both fundamental physics and novel commercial applications [10,11,12,13,14]. Based on the simulation and analysis of the dynamic process of the traditional release process, this paper designed a new scheme to transfer the single-layer graphene film on a Micromachines 2021, 12, 525. Based on the simulation and analysis of the dynamic process of the traditional release process, this paper designed a new scheme to transfer the single-layer graphene film on a stainless-steel substrate based on the IFM method. Suspended graphene sample fabrication will promote applications of graphene-based novel sensors and electronics
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