Abstract

Nanostructured vanadium oxide (nano-VOx) films were prepared on indium-tin oxide (ITO) glass substrate at low temperature by means of direct current (DC) reactive magnetron sputtering from pure vanadium target in Ar + O2 atmosphere. Field emission scanning electron microscope (SEM) reveals that the VOx film is composed of spheroidal nanoparticles whose diameters are in the range of 20–40 nm. This nano-VOx film shows a broad hysteresis loop whose width is as large as 41.6 °C. Moreover, the metal-insulator transition (MIT) can also be triggered by Joule heat produced by electrical current through the ITO sublayer. Compared to traditional heating of the sample by heating plate, this Joule heating is more efficient and convenient, which enables potential applications of this nano-VOx film on ITO conductive glass in compact storage devices.

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