Abstract
This paper examines the possibility of constructing deformable mirrors for adaptive optics with a large number of degrees of freedom, by assembling segmented silicon mirrors with bimorph piezoelectric actuation. The production process relies on silicon wafers and thick film PZT deposition technology; it is able to lead to an actuation pitch of the order of 5 mm, and the manufacturing costs appear to grow only slowly (linearly or less) with the number of degrees of freedom in the adaptive optics.
Full Text
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call