Large Lattice Mismatch Epitaxy

Abstract

ABSTRACTDuring the early stages of lattice mismatch epitaxy, island growth is observed in several systems. The evolution of this morphology is attributed to a large value of the substrate/layer interface energy. Origins of misfit and threading dislocations are also considered. Nucleation of misfit dislocations could occur either from steps present on surfaces of islands or from substrate/island edges. Arms of glide loops terminating at the surface in the first case form threading segments in the layer, whereas the coalescence of islands in which misfit dislocations are not aligned with respect to each other lead to threading dislocations in the second case. Existing approaches for lowering threading dislocation densities are also evaluated. A novel approach involving controlled, self-assembly of islands is presented to achieve the preceding objective.