Large-area total-thickness imaging and Burgers vector analysis of dislocations in β -Ga2O3 using bright-field x-ray topography based on anomalous transmission

Abstract

Using bright-field x-ray topography based on anomalous transmission (AT), we have demonstrated the first large-area total-thickness imaging of dislocations in β-Ga2O3 at the substrate scale. The dislocation images were acquired from the entire 10 mm × 15 mm × 680 μm (001)-oriented substrate prepared by edge-defined film-fed growth (EFG) by stitching together hundreds of topographic images, each recorded with the forward-diffracted beam in the Laue geometry for g = 020, 0–20, 022, and 400, under the conditions in which AT occurred. Dislocations distributed over the entire crystal volume were imaged as long as their Burgers vectors (b) were not orthogonal to the g-vectors. The results of the g·b analysis of the dislocation contrasts clearly revealed three major dislocation types that were numerically dominant in the EFG crystal: (i) b-axis screw-type dislocations with b∥ξ∥[010] (ξ is the unit vector of line direction), (ii) b-axis edge-type dislocations with b∥[001] and ξ∥[010], and (iii) curved mixed-type dislocations lying on the (001) planes with b∥[010]. Based on their b- and ξ-vectors, types (i) and (ii) were attributed to dislocations that propagated during EFG pulling up along the [010] direction, while type (iii) was attributed to dislocations generated through glide in the [010](001) slip system under stress. The extent to which AT can manifest itself is explained by using the effective absorption coefficient calculated for the above g-vectors based on dynamical x-ray diffraction theory.