Large-area patterning of multilayered green ceramic substrates using micro roller embossing

Abstract

Low-temperature co-fired ceramic (LTCC) offers many advantages as a material of multi-functional substrates for high-density, high-frequency microelectronic applications, as well as for enabling microsystems. One of the key challenges in manufacturing multilayered ceramic substrates is fabricating micro patterns on unfired green ceramic sheets, and micro embossing is an alternative and promising method for this purpose. This paper presents our achievements in fabricating micro patterns over a large area on multilayered green ceramic substrates using micro roller embossing. A commercialized roller laminating machine was modified and used as the roller embossing apparatus. The feasibility of micro roller embossing on green ceramic substrates with an effective panel size of 150 mm × 150 mm has been successfully demonstrated. Micro patterns, including channels and electrical passives with 50 µm line-width, were formed over the whole panel area. The influence of main process parameters on the pattern quality of roller embossing has been investigated and confirmed.