Abstract
YBa 2Cu 3O 7 (YBCO) superconducting thin films were deposited on (100)LaAlO 3 substrates 35 mm in diameter by pulsed laser ablation. The substrates were heated resistively during deposition by a single-crystal Si heater and the laser beam was scanned on the rotating YBCO target. The films exhibited a thickness variation of ±3.7%, with zero resistance temperature T c0 =90.6±0.6 K, critical current density J c =2.9±0.9×10 6 A/ cm 2 at 77 K, and at 10 GHz a surface microwave resistance of <250μΩ at 77 K. The above-mentioned properties showed that high-quality YBCO thin films over a large substrate area can be obtained with this laser ablation system.
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