Langmuir‐Blodgett films of liquid‐crystalline polymer with cholesterol side‐groups as electron resists

Abstract

Langmuir-Blodgett (LB) films are often compared to liquid crystals. The common feature of their structure two-dimensional order makes these materials similar I ) . So it seems very attractive to fabricate LB films of liquid crystals with their virtue to form well-ordered two-dimensional layers. On the other hand, in recent years, the growing interest in LB films of polymers also has been shown2-’). Such films have received considerable attention due to their stability a t high temperature, chemical resistance, good mechanical and dielectric properties. At the same time there exists a class of materials, that exhibits both liquid-crystal and polymer properties. These are comb-like liquid-crystalline polymers. Earlier, LB films of the copolymers of maleic anhydride derivatives with mesogenic vinyl monomers and mesogenic maleic anhydride derivatives with styrene have been created, in order to use them as insulating layers, lithographic resists and optical waveguides in opto-electronic devicess-lO). In ref. I t ) LB films of polysiloxane with mesogenic chromophoric side fragments are described. This paper is devoted to the investigation of the possibility of cholesteric liquid-crystalline LB monoand multilayer creation and to the application of these films for obtaining negative electron resists. The polymer used was poly{l-[ lO-(IOa-cholest-5-en-3/3-yloxycarbonyl)decyloxycarbonyl]ethylene) [poly(cholesteryl 1 1 -acr yloxyundecanoate)] with a molecular weight of about lo5: