Abstract
A laminated capacitor has been formed in a poly(oxymethylene) substrate of the thermoplastic resin by a laser-assisted micro powder jet implantation method. A carbon powder and a BaTiO3 powder were jetted for an electrode and a dielectric in turn with Ar gas while irradiating a Nd:YAG laser on the substrate, respectively. It was confirmed that the capacitance formed by this method was proportional to size of electrode areas and number of laminations. The dielectric constant estimated experimentally showed a large value of 5.2×103, which was probably enhanced by BaTiO3 particles crushed to a particle size of approximately 150 nm through the jetting process. It was found that the capacitance showed an exponential dependence against the coming and going repetition number of times of powder jetting at formation of the dielectric layer, which is probably affected by both the increase in the thickness and the decrease in the dielectric constant according to the number of dielectric laminations.
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