Abstract
This work reports laboratory angle resolved XRF measurements with the goal of establishing laboratory techniques to obtain a more complete idea of the intralayer composition of multilayer samples.
Highlights
In the non-destructive characterization of multilayer structures, the X-ray re ectometry (XRR) method is widely used in industrial and scienti c applications
We present two laboratory spectrometers which make quantitative nondestructive elemental depth profiling feasible
In XRR measurements, X-ray radiation is directed onto a sample at varying incidence angles and the re ected radiation is detected with a photodiode
Summary
In the non-destructive characterization of multilayer structures, the X-ray re ectometry (XRR) method is widely used in industrial and scienti c applications. A possible way of obtaining element speci c in-depth information from the sample non-destructively is the use of angle resolved X-ray uorescence (XRF) methods.[9] As in XRR, Xray radiation is used, though not the re ected radiation but the element speci c uorescence radiation emitted from the sample is detected. This provides additional information about the composition of the investigated sample since the elemental distribution is measured.
Sign-in/Register to view highlights & summary 
Published Version (
Free)
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call