Abstract
High quality La 1− x Ba x MnO z (LBMO) thin films were successfully grown by the ion beam sputtering method for the first time on MgO and LaAlO 3 (LAO) substrates simultaneously with a supply of molecular oxygen at a substrate temperature ( T s) of 700°C. These films exhibit a single phase and good crystallinity. Effects of oxygen partial pressure ( P O) on the crystallinity and c-parameter are studied systematically. The full-width at half-maximum (FWHM) averaged over (0 0 1) and (0 0 2) X-ray diffraction peaks shows a minimum at P O around 2 mTorr for the films grown on MgO. At this P O, FWHM for the films grown on MgO substrate is about 3 times less than that for the films grown on LAO substrate. This indicates that better crystalline films can be grown on MgO in this particular window of P O∼2 mTorr. The c-parameter values are much smaller for the films grown on MgO as compared to LAO.
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