L∞ Voronoi Diagrams and Applications to VLSI Layout and Manufacturing

Abstract

In this paper we address the L ∞ Voronoi diagram of polygonal objects and present applications in VLSI layout and manufacturing. We show that in L ∞ the Voronoi diagram of segments consists only of straight line segments and is thus much simpler to compute than its Euclidean counterpart. Moreover, it has a natural interpretation. In applications where Euclidean precision is not particularly important the L ∞ Voronoi diagram can provide a better alternative. Using the L ∞ Voronoi diagram of polygons we address the problem of calculating the critical area for shorts in a VLSI layout. The critical area computation is the main computational problem in VLSI yield prediction.KeywordsVoronoi DiagramCritical AreaVoronoi CellSimple PolygonVoronoi EdgeThese keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.