Abstract
Applications of Knudsen compressors as both microscale and macroscale vacuum pumps have been investigated. The study is based on a cascade analysis incorporating available transitional thermal transpiration and Poiseuille flow results for slender channels. It was found that the Knudsen compressor is an attractive possibility for microscale pumps down to a pressure of about 1 mTorr and for macroscale pumps to about 0.1 mTorr. A microscale pump for a micromass spectrometer providing a molecule flow rate of 5×1014 molecules/s results in the following pump characteristics: energy use of 2.4 W, pump volume of 13.9 mℓ at an inlet pressure of 1 mTorr and an energy use of 28.5 mW, and pump volume of 0.16 mℓ at an inlet pressure of 10 mTorr. A macroscale pump providing a pumping speed of 103 ℓ/s results in a pump with an energy use of 1786 W, and pump volume of 1695 ℓ at an inlet pressure of 0.1 mTorr. Several Knudsen compressor characteristics such as pressure rise, pumping speed, volume, energy use and mass flow are presented.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
More From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.