Abstract
The kinetics of reactions of CF3 radicals on various substrate materials has been studied in a gold-coated, stainless-steel, very-low-pressure photolysis (VLPΦ) cell as a function of temperature and radical concentration. The substrate materials were gold, stainless steel, copper, copper oxide, and silica. The CF3 radicals were generated from CF3I by IR-multiphoton decomposition. The reaction products observed with a mass spectrometer included HF, CO, CO2, COF2, SiF4, and C2F6. Rate constants were obtained as a function of temperature. CF3 reacted most rapidly on copper oxide surfaces; the other metal surfaces were less reactive, and the silica surfaces were least reactive. Previous studies from this laboratory that had reported the reaction of CF3 on fused silica are reinterpreted as reactions of CF3 on the stainless-steel heater assembly.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
