Abstract
The conditions necessary for achieving a stable bipolar ion generation (in the order of 10 6 ion/cm 3) and lower ozone concentration (less than 50 ppb) using a surface discharge microplasma device (SMD) by adjusting the applied voltage and frequency were experimentally determined and investigated. Measurements of the discharge current characteristics of the SMD revealed saturation against the frequency (1.5–2.5 kHz, depending on the applied voltage). The ion and ozone concentrations both increased in step with the discharge current in the lower frequency region. The ion concentration reached equilibrium in the frequency range of 200–500 Hz, and the point of equilibrium within that range depended on the applied voltage. The ozone concentration did not reach equilibrium under our experimental conditions (ozone concentration < 100 ppb). The kinetics of the ion/ozone generation rate with a focus on the plasma reaction and recombination of bipolar ions is discussed.
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