Abstract
The rate of copper dissolution in presence of phosphoric acid tert-butanol electropolishing mixtures was studied by measuring the limiting current which represents the rate of electropolishing. The rate of dissolution decreases by increasing phosphoric acid concentration, electrode height and the mole fraction of alcohol. The data show that addition of tert-butanol to phosphoric acid decreases the rate of dissolution of copper by an amount ranging from 68 % to 90 % depending on the dielectric constant of mixtures. Thermodynamic parameters are given.
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