Abstract
Kinetic Monte Carlo simulations of thin film growth during co-deposition of two model elements, A and B, on the striped substrate surfaces of A and B have been performed with changing the substrate temperature and the interatomic interactions in order to find out critical features maintaining the lateral superlattice structures during the film growth. Only the kinetic aspects are examined and the strain effect is not taken into account explicitly. Large barrier asymmetry for the jumps across the border of the stripes and large probability of detachment from wrong places are found to be essential to the good structural quality of the film.
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