Abstract
We discuss the kinetic energy distributions of sputtered particles predicted from our theoretical model for non-cascade sputtering processes. A comparison of our previously predicted distribution for the case of sputtering without charge transfer to the experimental energy distribution of 7Li + and 6Li + sputtered from a LiBr sample produces good agreement. In addition, we show how the theory can be used to predict the kinetic energy distribution for the case of sputtering with charge transfer. As an example, we compare that predicted distribution to the experimental energy distribution of NO + sputtered from solid NO; once again, we find good agreement.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Nuclear Instruments and Methods In Physics Research
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
