Kinetic energy distributions of sputtered particles in non-casade sputtering processes

Abstract

We discuss the kinetic energy distributions of sputtered particles predicted from our theoretical model for non-cascade sputtering processes. A comparison of our previously predicted distribution for the case of sputtering without charge transfer to the experimental energy distribution of 7Li + and 6Li + sputtered from a LiBr sample produces good agreement. In addition, we show how the theory can be used to predict the kinetic energy distribution for the case of sputtering with charge transfer. As an example, we compare that predicted distribution to the experimental energy distribution of NO + sputtered from solid NO; once again, we find good agreement.