Abstract

We report on key signal contributions in photothermal deflection spectroscopy (PDS) of semiconductors at photon energies below the bandgap energy and show how to extract the actual absorption properties from the measurement data. To this end, we establish a rigorous computation scheme for the deflection signal including semianalytic ray tracing to analyze the underlying physical effects. The computation takes into account linear and nonlinear absorption processes affecting the refractive index, thus leading to a deflection of the probe beam. We find that besides the linear mirage effect, nonlinear absorption mechanisms make a substantial contribution to the signal for strongly focused pump beams and sample materials with high two-photon absorption coefficients. For example, the measured quadratic absorption contribution exceeds 5% at a pump beam intensity of about 1.3×105W/cm2 in Si and at 5×104W/cm2 in GaAs. In addition, our method also includes thermal expansion effects as well as spatial gradients of the attenuation properties. We demonstrate that these effects result in an additional deflection contribution that substantially depends on the distance of the photodetector from the readout point. This distance dependent contribution enhances the surface related PDS signal up to two orders of magnitude and may be misinterpreted as surface absorption if not corrected in the analysis of the measurement data. We verify these findings by PDS measurements on crystalline silicon at a wavelength of 1550 nm and provide guidelines on how to extract the actual attenuation coefficient from the PDS signal.

Highlights

  • Optical absorption processes in dielectric materials play an important role in various optical devices

  • We report on key signal contributions in photothermal deflection spectroscopy (PDS) of semiconductors at photon energies below the bandgap energy and show how to extract the actual absorption properties from the measurement data

  • We find that besides the linear mirage effect, nonlinear absorption mechanisms make a substantial contribution to the signal for strongly focused pump beams and sample materials with high two-photon absorption coefficients

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Summary

INTRODUCTION

Optical absorption processes in dielectric materials play an important role in various optical devices These range from optical waveguides for telecommunication, solar cells for photovoltaics, and nano-optical polarizers for the ultraviolet range up to components for high-precision interferometers and laser resonators.[1,2,3,4,5,6] Collinear photothermal deflection spectroscopy (PDS) is a powerful method to investigate spatially resolved absorption properties of transparent samples, e.g., organic materials as thin films and semiconductors below the bandgap energy.[7–10] in high-precision optical metrology, crystalline semiconductors such as silicon and gallium arsenide are promising materials. IV, we present the experimental results and illustrate how to extract the optical attenuation coefficient from the measured PDS signal

PRINCIPLES OF PHOTOTHERMAL DEFLECTION SPECTROSCOPY
PDS SIGNAL COMPUTATION
Temperature field in the PDS setup
Refractive index field
Bulk deflection
Surface deflection
Experimental setup
Investigation of thermal expansion
Extraction of the attenuation coefficient
CONCLUSION
Literature
Full Text
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