Junction delineation and EBIC on FIB cross section

Abstract

This paper presents a sample preparation study on a FIB based X-section. It shows that wet etching is a simple and reproducible solution for the decoration of both implanted and deposited layers. The methodology is applicable on bare or packaged dice. Results with EBIC on FIB cross-sections were also obtained. A specific double FIB box method was developed and characterized to improve spatial resolution of EBIC.