Abstract

The method used to optimize the spacing between the main junction and the floating field limiting ring structure to improve breakdown voltage is presented. TMA PISCES-2B Version 9033, a 2-D device simulation program extended to a quasi-3-D simulator using cylindrical coordinates, is used to analyze this structure and evaluate design alternatives. The junction-to-ring structure spacing is varied from 0.5 to 5.5 μm in steps of 1.0 μm and each structure is evaluated for its associated junction breakdown characteristics. Both rectangular and cylindrical coordinates are used for comparison purposes. The field-limiting structure ranges from a one-guard-ring to a two-guard-ring structure. Breakdown characteristics are determined by plotting the I- V curves, electric field lines, impact ionization generation rate, potential contours, and current flowlines.

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