Abstract
This paper presents a MEMS-based ER microgripper by integrating a flexible ER microvalve (FERV) and soft chamber made of silicon rubber (PDMS). The ER microgripper works by actuating two arms. Each arm consists of a FERV, a movable chamber, and a displacement constraint element. The structure of the FERV is the fluidic channel-embedded cantilever with parallel electrodes inside. The static and dynamic characteristics of the fabricated FERV are experimentally investigated. A movable chamber is successfully fabricated by bonding top and bottom structures that are separately formed. A displacement constraint element (thin film structure of nickel) is well-fabricated by using the electroplating. By integrating these three parts, the arm for an ER microgripper is realized and the experimental results prove the feasibility of ER microgripper.
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