J114035 薄膜導電性高分子材料を用いたマイクロ通電加熱システムの基礎検討([J114-03]次世代アクチュエータシステム(3))

Abstract

Fundamental mechanical characteristics of a small actuator using thermal expansion of a conductive polymer have been investigated. The conductive polymer layer (t30 μm) of a polythiophene type (SEPLEGYDA, Shin-Etsu Polymer Co.) is coated on a thin film polyimide diaphragm (φ5 mm, t10 μm). The polyimide diaphragm is deflected by the thermal expansion of the conductive polymer when an electric current is applied to the polymer. Thin film metal layer such as aluminum has been used as a conductive layer in conventional thermal expansion actuators. Merits of using the conductive polymer are, for example, flexibility of the actuator, ease of the fabrication without using heat process; a diaphragm of a low heat-resistance material can also be used. The relationship between the temperatures and the displacements at the diaphragm center was measured and compared with those of the actuators using other conductive layers fabricated on the diaphragm such as vapor-deposited aluminum (t0.1 μm) and sputtered ITO (Indium Tin Oxide, t0.1μm). The results show that the actuator using the conductive polymer has the temperature-displacement characteristics almost similar to that using the aluminum layer.