Fundamental characteristics of a MEMS‐diaphragm actuator using a thermal expansion drive composed of a conductive polymer

Abstract

Performance of a MEMS actuator using a thermal expansion drive of a conductive polymer (CP) is investigated by applying electricity to it. The actuator consists of a thin polymer diaphragm (5 mm diameter) and a thin CP (ion‐doped polythiophene) layer coated on the diaphragm surface. Polyimide (10 μm thickness) and PET (110 μm thickness) sheets were chosen as the diaphragm materials. The diaphragm is deflected by the thermal expansion of the CP by applying electricity to it. Merits of using the CP instead of metal are realizing flexible actuators and the applicability to a low‐heat‐resistant material diaphragm. The relationship between thickness of the CP layer (10–50 μm thickness) and electrical resistance (30–600 Ω) and the relationship between the input voltage (1–8 V) and the generated diaphragm displacement (several tens of micrometers) were investigated experimentally. These relationships were compared with those in the case of using the thermal expansion of a vapor‐deposited aluminum layer (0.1 μm thickness). The results of the investigation indicate that the diaphragm based on CP can produce the required displacement. In the case the CP‐layer‐based thermal expansion, however, larger input voltage than in the case of the aluminum‐layer‐based thermal expansion is needed to obtain the same displacement amplitudes. Therefore, the main problem concerning use of the CP‐based diaphragm is considered to be enhancing the electrical conductance of the CP layer. © 2014 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.