Abstract
This chapter discusses the scattering of light from multilayer systems with rough boundaries. Multilayer systems are employed in various branches of applied optics and the optics industry. The chapter reviews the important theoretical and experimental results concerning the optics of rough multilayer systems. The physical models of rough boundaries (surfaces) play an important role in the optics of rough multilayer systems. The theoretical approaches enable us to calculate optical quantities corresponding to the rough boundaries and rough thin film systems. The interpretation of experimental data using the theoretical results introduced has been described. Relevant methods for the optical characterization of rough surfaces, rough single layers and rough multilayer systems have been outlined. The chapter also focuses on the scattering of X-rays from rough surfaces and thin film systems with rough boundaries.
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