Iterative deconvolution using the MRI model for removing experimental broadening and shift effects in SIMS depth profiles

Abstract

During the last years, depth resolution of secondary ion mass spectrometry (SIMS) has been enhanced, mainly by solving direct and inverse problems of depth profiling. The solution of both problems is based on the depth resolution function (DRF). Solving the direct problem is frequently done by using the DRF of the Mixing‐Roughness‐Information depth (MRI) model, and solving the inverse problem is frequently achieved by using the DRF proposed by Dowsett and coworkers. However, using the latter may create difficulties in determining the true position of the measured profiles. In this paper, it is proposed to solve iteratively the inverse problem of SIMS depth profiling using the analytical DRF of the MRI model. The iterative deconvolution using the MRI model is tested on theoretical and experimental profiles. It is shown that the proposed procedure is able to provide a non‐negligible improvement; the artificial broadening of the measured profiles is clearly reduced, and their shift from the actual positions is corrected.